基体表面粗糙度对磁控溅射TiN涂层界面结合力的影响

摘要

利用球与平面的赫兹接触应力分布的经验修正公式［1 ］，对磁控溅处理前的基体表面粗糙度对沉积层和基体的界面结合力进行了研究，并和其 他涂层界面结合力的测量方法进行了比较。结果表明：基体表面粗糙度对界面结合力有很大 影响，表面粗糙度的改善有利于TiN层/基体的界面结合力的提高，同时改善了TiN层的摩擦 学性能。%The boundary adhesion strength of magnetic sput tered TiN coatings on GCr15 steel substrates with different surface roughness w as studied employing the revised Hertz contact stress formulas based on ball/pl ane［1］. The measured and calculated data were compared with those got by other methods. The results showed that the surface roughness of substrate influenced greatly the adhesion of TiN coating deposited by magnetic sputtering deposition process. Improving the surface roughness of substrate is beneficial to increasing the adhesion of TiN coating, and then to improving its tribologic al property. This study is important in advising the practical application of T iN coating.