二维直线运动平台几何误差建模与数字化分析

摘要

针对二维直线运动平台的定位精度受到绕X、Y、Z三个方向转动产生的角位移误差和沿着这三个方向的线位移误差的影响,采用一种基于三维模型的数字化方法对这些几何误差进行分析.通过参考坐标系和齐次变换矩阵建立二维直线运动平台几何误差运动学模型,并基于误差模型对运动平台的各项几何误差进行分配、计算和合成.基于以上误差分配原则对运动平台使用的导轨提出形位公差要求.通过上述工作,在虚拟样机设计阶段能对所设计结构几何误差进行预测,为后续精密运动的设计提供可靠的参考.%Geometric errors of the two-dimensional linear motion stage including rotation angular displacement errors around the X,Y,Z directions and linear displacement errors along the X,Y,Z directions are analyzed by a three-dimensional digital model.A reference coordinate system is established to analyze the errors in different axes through homogeneous transformation matrix, which are then optimized and synthesized by reconstruction of the digital model to achieve desired specifications of the motion stage.A method is described to allocate shape and linear tolerance of geometric parts based on the geometric errors that will be valued for precision motion system design.