超声切割SiC单晶时金刚石线锯磨损特性的研究

摘要

Cost of the diamond wire saw is the second only to SiC single crystal material itself when ultrasonic wire saw cutting of SiC wafer. The force model was established on the condition of ultrasonic⁃assisted wire saw cutting. Theoretical analysis and related ex⁃periment of forces and failure forms of the diamond wire saw were done. The influence rules were studied on the feed speed of the work⁃piece to wire saw slanting angle, cutting way to wire saw wear, cutting fluid to wire saw wear and abrasive failure modes to the proper⁃ties of wire saw cutting. The results show that the wire saw is easy to be pulled apart with the workpiece feed rate or the ultrasonic am⁃plitude increasing. However, if it is too small, the cutting efficiency may be decreased. In order to improve efficiency by increasing the workpiece feed rate, it is a must to increase the strength of wire saw or roller diameter, or to reduce the wire saw speed. Wire saw wear is reduced about 40% when ultrasound⁃assisted cutting. The wire saw surface block is more serious when using Ecocool Resist EP mi⁃croemulsion as compared with running water;and slight broken of diamond grits are benefit to cutting.%超声线锯切割SiC单晶时，金刚石线锯的成本仅次于SiC单晶材料本身的成本。建立了超声辅助切割SiC单晶时线锯受力模型，对线锯受力和失效形式进行了理论分析，并进行了相关试验，研究了工件进给速度对线锯偏角、切割方式对线锯磨损、切削液对线锯磨损以及磨粒破坏形式对线锯切割性能的影响规律。结果表明：工件进给速率及超声振幅增大，线锯易被拉断，但过小，切割效率会降低，要想通过增大工件进给速率提高效率，必须提高线锯强度，增大导轮直径，降低线速；超声辅助切割时线锯磨损可降低约40％；与自来水相比，使用Ecocool Resist EP微乳化液后线锯表面堵塞较严重；金刚石磨粒的微小破碎、有利于切割。