基于光学鼠标传感器的中远距离微位移测量装置的设计

摘要

In the process of the single-crystal diamond flexible grinding, the distance between eddy current sensor used to measure the floating of grinding plate and surface of grinding plate is too short, which causes difficulty for adjusting the grinding plate. To enlarge the measuring distance, this paper proposes a method of long-range micro-displacement measurement based on optical mouse sensor ADNS3080, analyzes the measurement principle and designs the optical path of system, display window, data storage, measuring software. It is proved that this method could realize long-range micro-displacement measurement through test.%在单晶金刚石弹性研磨过程中,测量研磨盘浮动的涡流传感器与盘面的距离较小,不利于研磨盘的调整.为了提高测量距离,提出了一种基于光学鼠标传感器ADNS3080的中远距离的微位移测量方法,分析了测量原理,对测量系统的光路、显示窗口、数据的存储、测量软件部分进行了设计.并通过试验证明该方法能实现中远距离微位移的测量.