光栅在通信、光存储及光谱分析领域具有广泛的应用。对超声辅助UV-LIGA技术制备光栅的可行性进行了试验研究。试验中两次利用超声的特殊效应，实现不同的辅助功能。1)采用超声辅助显影，通过改善光刻胶模沟槽内的物质传输，提高光刻胶模结构的显影效率和显影质量。2)在后烘之后、显影之前对光刻胶结构进行超声处理，通过在空气中对光刻胶模结构进行超声处理，有效降低SU-8胶模在电铸过程中的溶胀。选取优化的工艺参数，采用侧向冲液电铸方式，获得了镍基光栅。%The grating is widely used in the fields of communication, optical storage and spectroscopy. In this paper, the experiment of grating preparation by ultrasonic-assisted UV-LIGA is conducted. Different auxiliary functions are realized by using special ultrason-ic effects twice. Firstly, the ultrasonic-assisted process is used to improve the substances transmission in the photoresist mold groove, the developing efficiency and quality. Secondly, the ultrasonic-assisted developing is introduced between the processes of post-baking and developing, and the structure of photoresist mold is subjected to the ultrasonic treatment in the air, then the swel ing of plastic mold of SU-8 is reduced evidently in the electroforming process. The process parameters are optimized and the lateral red liquid electroforming way is adopted. Final y, a thickness of 65μm nickel based grating is successful y prepared.
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