为了研究激光反射镜热畸变补偿结构的设计,在分析激光腔镜热变形行为的基础上,采用优化镜体结构,提出了一种减少入射激光光斑区域镜面热畸变的途径——热畸变自补偿激光反射镜,并与普通硅镜的热变形情况进行了比较.结果表明,当反射镜反射率为98％、入射激光功率为7kW、激光照射时间分别为2s,4s和10s时,普通硅镜镜面中心与光斑边缘处的热变形之差分别为0.167μm,0.174μm和0.172μm;而热畸变自补偿激光反射镜镜面中心与光斑边缘处的热变形之差分别为0.092 μm,0.052μm和0.027μm.该研究结果对提高高能激光腔镜热效应稳定性、改善高能激光光束质量具有一定参考价值.%A high-power laser mirror with self-compensation for thermal distortion was presented and numerically simulated on the basis of its thermal deformation behavior after optimizing its substrate structure. When 7kW laser was input in 17cm diameter, and the reflectivity of the mirror was 98% , the difference between central maximum thermal distortion and boundary thermal distortion within laser radiation region on the mirror surface for the general silicon substrate ( peak valley values) was 0. 167μm, 0. 174μm and 0. 172μm respectively, under the radiation time of 2s, 4s and 10s. However, the thermal distortion difference (peak valley values) of the laser mirror with self-compensation of thermal distortions was 0. 092μm, 0.052μm, 0. 027μm, respectively. The study results are useful for improving the heat-effective stability and beam quality.
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