碲镉汞薄膜减薄工艺损伤层的评价方法及应用

摘要

碲镉汞薄膜减薄工艺损伤层的研究至关重要。本文阐述了可用于表征碲镉汞薄膜减薄工艺损伤层的评价方法，简要介绍了各个测试方法的原理和功能；并对评价方法进行了具体应用，得到了非常有价值的实验结果。这对碲镉汞薄膜减薄工艺损伤层的认识和后续的工艺优化具有非常重要的指导意义。%Damage study in subsurface polishing technology of HgCdTe films is very important.An evaluation method for characterizing damage in subsurface polishing technology of HgCdTe films was elaborated,and the principles and functions of each measurement method were simply introduced.These methods have been used for the practice and the very valuable experiment results have been obtained.This investigation has very important direction significance for understanding damage in subsurface polishing technology of HgCdTe films and next technology optimization.