不锈钢表面光纤激光掩膜微细电解复合加工

摘要

为了实现不锈钢微细电解定域加工,提出激光掩膜表面改性微细电解复合加工技术.研发了激光掩膜微细电解复合加工装置,并进行样件加工试验.首先,采用光纤激光在304不锈钢表面扫描加热进行打标图案,利用X射线光电子能谱分析(XPS)对不锈钢表面激光打标图案进行分析,发现激光在不锈钢表面打标时被空气氧化生成铁、铬等氧化物,生成的打标图案具有耐腐蚀性,形成保护性掩膜.然后进行电解加工,由于掩膜图案在电解过程中起到保护作用,选择合适的电解加工参数,在不锈钢表面能加工复杂的微结构.最后利用SEM、光学轮廓仪来观测微结构形貌、粗糙度等.研究结果表明:利用激光表面改性,结合微细电解加工能实现304不锈钢微结构的快速加工,该工艺在微细加工领域具有很好的发展前景.%In order to fabricate microstructure of stainless steel,the electrochemical micromachining(EMM)with la-ser masking surface modification for 304 stainless steel was proposed.A device of EMMwith laser surface modification was developed,and the corresponding experiments were carried out.Firstly,fiber laser was used to mark the pattern on the surface of 304 stainless steel.The marking pattern was analyzed by X ray photoelectron spectroscopy(XPS).It is found that there are the iron oxide and chromium oxide on the surface of stainless steel,and the marking pattern has corrosion resistance.Secondly,the complex micro structures can be fabricated by EMM with laser surface modifica-tion,since the marking patterns on the surface of stainless steel play a protective role in the subsequent EMM under the appropriate machining parameters.At last,the shape and the roughness of the samples were measured by scanning electron microscope(SEM)and optical profilometer.The results show that the rapid fabrication of microstructures on the surface of 304 stainless steel can be achieved by EMM with laser masking,which has a good prospect in the field of micro machining.