METHOD FOR MANUFACTURING MICROLENS AND PHOTOMASK FOR MANUFACTURING MICROLENS

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a microlens, for manufacturing a flow lens type microlens, in which microlenses each having a square pattern in a plan view and a convex surface are arranged in a matrix on a plane and a gap between diagonally adjoining microlenses is decreased, without increasing a process load or without inducing reduction in qualities, and to provide a photomask to be used for the method.;SOLUTION: The process of manufacturing a microlens comprises steps of uniformly coating an object with a transparent resin as a raw material of the microlens to which photosensitivity is imparted, selectively patterning the resin layer by a photolithographic process using a photomask, and forming a lens shape by using a thermal reflow property of the material. The photomask has such a pattern in which approximately rectangular patterns are two-dimensionally arranged into a matrix and small patterns are added to be continuous to corners of each rectangle so as to narrow a gap in a diagonal direction.;COPYRIGHT: (C)2014,JPO&INPIT