Zn1-xCaxO薄膜的结构和光学性质研究

摘要

采用磁控溅射法在玻璃基片上制备了Zn1-xCaxO薄膜。利用X射线衍射仪(XRD)和荧光光谱仪研究了Ca掺杂量对Zn1-xCaxO薄膜结构和光致发光特性的影响。结果显示：Zn1-xCaxO薄膜属于纤锌矿多晶结构；随着 Ca含掺杂量的增加，薄膜衍射峰半高宽变大，薄膜质量变差；光致发光谱显示，随着 Ca掺杂量的增加，紫外发光谱峰发生了蓝移。%Zn1-xCaxO thin film is fabricated on glass substrates by magnetron sputtering. The influences on the properties of structural of Zn1-xCaxO films and photoluminescence of Ca doping contents are studied by using the XRD、fluorescence spectroscope. The results are as followings: Zn1-xCaxO thin films belong to polycrystalline structure of wurtzite; with the increasing of Ca content, FWHM of diffraction peak widens and film quality deteriorates. Photoluminescence spectra show that with Ca doping concentration increasing, ultraviolet photoluminescence peak is blueshiftted.