为了获得满意的运动精度,针对以往直线电机进给系统研究中被忽略的机械系统动态特性,利用达朗贝尔原理建立了机械系统的动力学模型,对直线电机进给实验台的机械系统动态特性及影响因素进行了理论分析和实验测试,同时分析讨论了机械系统频率特性对进给系统运动精度的影响.结果表明:尽管直线电机进给系统机械环节结构简单,但依然具有复杂的动态特性,影响系统运动精度；伺服控制速度环增益越高,机械系统进给方向固有频率越高；随着进给速度的提高,工作台各方向振动频率与幅值均增大,当速度提高1倍时,俯仰振动和偏摆振动致使工作台产生的位移波动增大2倍.%To obtain the desired dynamic precision, aiming at the dynamic characteristics of the mechanical system neglected in previous researches, the dynamic model of mechanical parts in linear motor feed system is established with d' Alembert principle to analyze the dynamic characteristics and influence on motion characteristics of feed system. The theoretical and experimental investigations are implemented in the mechanical system of linear motor feed test-bed. Meanwhile the influence of mechanical frequency characteristics on the dynamic precision of feed system is analyzed and discussed. The results show that the mechanical system is endowed with complex dynamic characteristics although all intermediate transmission mechanisms are canceled, which affect the dynamic precision. The higher gain in speed control loop, the higher natural frequency of mechanical system in feed direction. With the increasing feed speed, the frequency and amplitude of each vibration mode of the table increase, and for the double velocity, the displacement fluctuations of table caused by the pitch vibration and yaw vibration are increased by two times.
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