生长温度对掺钛氧化锌薄膜光学性质的影响

摘要

Ti-doped zinc oxide (TZO) thin films were deposited by radio-frequency magnetron sputtering method using a sintered ceramic target. The effect of growth temperature on structure and optical properties of TZO thin films was investigated by X-ray diffraction, UV-visible spectrophotometer and whole optical spectrum fitting. The results show that all the obtained films are polycrystalline with a hexagonal wurtzite structure and grow preferentially in the (002) direction. The growth temperature significantly affects the grain size and optical transmittance of the TZO thin films, but slightly influences the refractive index, extinction coefficient and optical bandgap of the deposited films. The TZO thin film prepared at growth temperature of 200 ℃ possesses the maximum grain size, an average transmittance of 76. 1 % in the visible light range, and an optical bandgap of 3.45 eV.%以氧化锌钛陶瓷靶作为溅射源,采用磁控溅射技术在玻璃衬底上制备了掺钛氧化锌(TZO)透明导电薄膜,通过X射线衍射仪和分光光度计测试表征以及全光谱拟合法分析,研究了生长温度对TZO薄膜晶体结构和光学性质的影响.结果表明:所有TZO样品均为六角纤锌矿结构,并具有(002)择优取向,生长温度对薄膜晶粒尺寸和光学透射率的影响较明显,而对折射率、消光系数和光学能隙的影响较小.当生长温度为200℃时,TZO薄膜的晶粒尺寸最大,可见光范围平均透射率(含衬底)为76.1％,对应的直接光学能隙为3.45 eV.