基于光栅尺反馈的高精度步进电机位移台系统开发

摘要

A control system was developed ,which uses stepper motor stage as actuator ,grat‐ing as feedback element .This system improves the stage’s accuracy by using personal computer (PC) program and grating feedback and realizes the Proportion Integration Differentiation (PID) control over the stage’s displacement without changing the screw machining accuracy and the sig‐nal transmission quality .The system reduces the absolute error from 0.5 mm to 0.005 mm in the w hole stroke .T he error range achieves the system accuracy requirements .%为提高轮胎轮廓扫描仪两侧定位精度，开发了一款以步进电机位移台为执行元件，光栅尺传感器为反馈元件的控制系统。在不改变步进电机位移台丝杠加工精度及信号传输质量的情况下，通过上位机程序与光栅尺反馈，实现对位移台位移量的PID控制，提高了位移台精度。将步进电机在行程中的绝对误差由0.5 m m降低并控制在0.005 m m左右，达到系统精度要求。