双光栅尺在高速高精度位移测量中的应用

摘要

As the grating structure, it is difficult to achieve high speed, high precision micron and nanometer measurement by a single grating scale. A high speed, high precision displacement measurement instrument based on double grating scales was designed. Through programmable logic device FPGA, the signals from rough and cleaners grating scale were switched and merged to achieve high speed and high resolution displacement measurements. Experimental results show that while the maximum allowable moving speed of grating scale is greater than 1.2 m/s, the measurement resolution is 10 nm. It has wide application prospect in the field of high speed, high precision and wide range linear displacement measurement.%由于光栅尺本身结构上的原因,采用单一光栅尺难以实现高速高精度的微纳米测量.设计一种基于双光栅尺的高速高精度位移测量仪,通过可编程逻辑器件FPGA对粗、精光栅尺信号进行切换与合成,实现了高速高分辨率的位移测量.实验结果表明:在光栅尺运动速度大于1.2m/s时,采用此方法可达到10 nm分辨率.它在高速高精度和大量程的直线位移测量领域具有广泛的应用前景.