单臂集束型装备随机Petri网模型与性能分析

摘要

The cluster tools have many configure mode and operation processes,which result in the diffi-culties in equipment performance analysis.The paper presents a Stochastic Petri nets approach to modeling and analysis of cluster tool.The reachability,boundedness and liveness of model are verified by Visual Object Net ++ tool.The performance of the cluster tool is computed by the Markov process method.It in-dicates that this model not only represents the concurrent activity of the cluster tool,but also represents the stochastic occurrence times of all activity,compared with timed Petri net.%针对因集束型装备配置非常灵活,运行模式多样造成的对装备性能分析困难的问题,提出一种用随机Petri网对集束型装备的运行过程进行建模,分析模型,计算装备性能的方法.利用工具Visual Object Net＋＋验证模型的可达性,活性,有界性.采用马尔可夫过程方法分析模型和计算性能.结果表明：该模型不仅可表现集束型装备的并发性,而且能表示出装备运转活动持续的随机的时间特性.与赋时Petri网模型相比,该方法更能反映装备实际加工过程.