Co2FeAl alloy films were prepared by magnetron sputtering at different powers and annealed at different temperatures. The influence of sputtering power and annealing temperature on the magnetic properties of Co2FeAl films was investigated by vibrating sample magnetometer (VSM) and X-ray diffraction (XRD), respectively. The results show that the as-deposited film sputtered at low power is weak-magnetic. Then the alloy annealed at 300 ℃ exhibits magnetic anisotropy. In contrast, the as-deposited film sputtered at high power is ferromagnetic and exhibits uniaxial magnetic anisotropy. Moreover, It is found that the in-plane magnetic anisotropy disappears when the samples were annealed at 700 ℃. X-ray diffraction measurements reveal the grain size of the films increases with the annealing temperature. The coercivity is found to increase with the annealing temperature, which is accordance with the grown nanocrystalline grain size.%用磁控溅射法制备了一系列Co2FeAl合金薄膜,并进行了退火处理.利用振动样品磁强计(VSM)和X射线衍射(XRD)对样品进行表征,研究了溅射功率和退火温度对Co2FeAl薄膜磁与结构特性的影响.高功率下制备的沉积态薄膜就具有强磁性,同时也具有单轴磁各向异性;而对应的低功率下制备的沉积态薄膜则呈现出弱磁性.300 ℃退火后出现单轴磁各向异性;700 ℃退火后,所有薄膜均表现为磁各向同性.随着退火温度的升高,薄膜的矫顽力变大.X 射线衍射分析表明,随着热处理温度升高,薄膜的晶粒尺寸增大,从而导致晶粒间磁耦合作用增强,这与薄膜的磁特性结果相一致.
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