ZnO纳米薄膜材料对乙醇室温气敏性的研究

摘要

ZnO nano-films were prepared on glass substrates by chemical vapor deposition (CVD).Dif-ferent samples are prepared and tested for ethanol gas sensitivity at room temperature by keepingthe holding time (10min) and temperature (650C) unchanged.Temperature rise and fall along withthe furnace, instantaneous rise and fall, three-way control and cylinder opening are used to controlthe rate of temperature rise and fall and oxygen flow.The results show that the sample preparedby the way of temperature rise and fall with furnace and three-way controlled airflow has the bestsensitivity to ethanol at room temperature.When the concentration of ethanol is 2500ppm, thesensitivity reaches 476％, and the selectivity is better than that of acetone.X-ray diffraction andscanning electron microscopy photographs show that the sample is Tetrapod-like nano-ZnO struc-ture of hexagonal wurtzite.%采用化学气相沉积 (CVD) 法在玻璃基底上制备ZnO纳米薄膜.制备过程保持保温时间 (10min) 和温度 (650℃) 不变, 分别采用随炉升降温和瞬间升降温、三通控制和气瓶直开的方式控制升降温速率和氧气流量, 制备出不同的样品并进行室温乙醇气敏性测试.结果显示采用随炉升降温和三通控制气流方式制得的样品在室温下对乙醇具有最佳灵敏度——-乙醇浓度为2500ppm时, 灵敏度达到476％, 同时相对于丙酮具有较好的选择性.X射线衍射图谱和扫描电子显微镜照片显示该样品为六方纤锌矿四足状纳米ZnO结构.