CdS and CdTe thin films were deposited in turn on glass substrates by using the chemical bath deposition ( CBD ) and vacuum evaporation, and annealed in different environment to form CdS/CdTe heterojunction. The microstructures and optical properties of the films were characterized with X-ray diffraction ( XRD) , scanning electron microscopy( SEM) , atomic force microscopy (AFM) and UV-VIS Spectrophotometer. The results show that all the films have the cubic structure and (1l1) is the preferential growth orientation. With the increase of heat treatment temperature, the grain size of the film increases obviously, resulting in a considerable thinning of CdS layer, but the roughness of the film also increases. After annealing in CdCl2 atmosphere, the grain size increases, the roughness of the film deceases significantly and the preferred orientation of ( 111 ) crystal plane enhances. In the meanwhile, the transmittance of the film deceases, which favorably improves CdTe solar cell spectral response and carrier collection.%在玻璃衬底上依次采用化学水浴法（ CBD）和真空蒸发工艺沉积CdS和CdTe薄膜，并在不同条件下进行热处理，制备了CdTe/CdS异质结复合薄膜。利用XRD、SEM、AFM和UV-VIS透射光谱对薄膜的结构、表面形貌、剖面及光学性能进行了研究。结果表明：以玻璃衬底和CdS薄膜作为衬底沉积的 CdTe多晶薄膜结构相似，均具有（1l1）面择优取向；不同条件下制备的薄膜致密且粒径均匀，随着热处理温度的升高，薄膜晶粒增大明显，并出现CdS层减薄的现象，但薄膜的粗糙度也随之增大；CdCl2氛围下热处理后，薄膜粒径增大，粗糙度明显降低，其（111）晶面的择优取向进一步增强，且透过率下降，这对于提高太阳电池的光谱响应是非常有利的。
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