场发射扫描电镜上探头探测效率下降的现象及原因分析

摘要

Based on the phenomenon that efficiency declined at Hitachi FESEM Upper detector, and with which image resolution decreased, analyzed the reasons of the decline, pointed out that under high accelerating voltage back scattered electrons with high energy, increases the probability of a rebound into Upper detector, and leads to the aluminum film damage and scintillators charging. Air can neutralize and take charge. This is of great significance to extend the life of Upper detector and maintain FESEM in good state.%针对部分日立场发射扫描电镜上探头探测效率下降而导致图片分辨率下降等现象，分析了上探头探测效率下降的原因，指出在高加速电压下高能背散射电子经反弹进入上探头的概率随之增加，导致铝膜的损坏和闪烁体的充电，空气可以中和并带走电荷。这对延长电镜上探头的寿命及保持电镜处在较好的使用状态具有重要意义。