Field emission source i.e. field emission cathode, for use in electron beam system, has nanowires provided on substrate, and field emission structure automatically transferring emission during failure of field emission structure

摘要

The source i.e. field emission cathode, has nanowires provided on an electrically conducting substrate and developed in a polymer-ion track-membrane over which electrical potential difference is made between the cathode and an anode. The cathode emits over a surface of ensembles of a field emission structure with the potential difference from a point of the structure. Another field emission structure automatically transfers the emission during failure of the structure. The cathode is made of corrosion-resistant material, and the nanowires are made of magnetic or non-magnetic material.