of;
Materials;
Science;
and;
Engineering,;
South;
China;
University;
of;
Technology,;
Guangzhou;
510000,;
China;
of;
Materials;
Science;
and;
Engineering,;
Central;
South;
University,;
Changsha;
410083,;
China;
氧化物薄膜; 电容特性; 组成变化; 傅立叶变换红外光谱仪; 扫描电子显微镜; RuO2; X射线衍射仪; 电化学分析仪;