脉冲阴极弧放电制备碳膜及其性能研究

摘要

使用自行搭建的高压脉冲大电源,并且利用PLC的控制SCR触发装置产生微秒级单脉冲进行了弧光放电。在一定电压、一定气压、一定距离下,进行了薄膜制备,对薄膜进行了电镜分析和XRD分析。说明在合适的电压、气压和距离下,用该套设备可以制备出比较均匀、结晶性能比较好的薄膜。%We use a self-built high-voltage pulsed power get the glow discharge and the use of PLC control SCR triggering device for generating a single pulse microsecond are discharge, and we measured discharge-voltage and discharge-current with an oscilloscope. We plate films in different voltages, distances and pressures. We analysis the films through the ways of electron microscopy and XRD methods. We prepare better uniform films which have good crystallization properties in appropriate voltage, air pressure and distance.