目的 改变纯钛表面的成分,提高其硬度和耐磨损性能.方法 对纯钛试样表面行3×1017ions·cm-2和9×1017ions·cm-2两种剂量的氮离子注入.以能量散射光谱测定分析其表面元素的改变,显微硬度仪测量其显微硬度,纳米划痕仪测量其表面的耐磨损性能,扫描电子显微镜观察其注入前后的划痕形貌.综合分析其微观摩擦学性能的改变.结果 氮离子注入后,纯钛试样表面成金黄色.在注入3×1017ions·cm-2和9×1017ions·cm-2剂量的氮离子试样表面,氮元素的原子百分率分别为24.08%和35.83%.试样表面的显微硬度值提高.纯钛的摩擦系数较氮离子注入前明显降低,其中注入剂量为9×1017ions·cm-2的纯钛较剂量为3×1017ions·cm-2的纯钛摩擦系数小.结论 氮离子注入可提高纯钛的硬度,改善其耐磨损性能.%Objective To change the composition of titanium surface, and improve the wear resistance. Methods Nitrogen was implanted into the surface of pure titanium using plasma ion implantation, the ion implantation dose was 3×1017 ions·cm-2 and 9×1017 ions·cm-2. The change of surface elements was analyzed by energy-dispersive spectrometry. The hardness of the treated samples was evaluated with micro-hardness tester. The wear resistance was measured by nano-scratch tester. The scratch morphology was analyzed by scanning electron microscope. Results The samples modified by plasma ion implantation showed light golden. The ion implantation dose of 3×1017 ions·cm-2 and 9×1017 ions·cm-2 nitrogen atom content of the samples were 24.08% and 35.83%. The hardness of samples after ion implantation was significantly greater than the samples before ion implantation. The friction coefficient of samples after ion implantation decreased significantly. Conclusion After nitrogen ion implantation, hardness increased significantly, wear resistance of pure titanium can also been improved.
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