基于PVDF扫描测头的电路系统构建及性能测试

摘要

一种采用PVDF薄膜和压电传感器结合钨探针构成的新型扫描测头可以对柔软易损坏及具有大台阶特征的表面实现高精度非破坏性测量.基于该新型测头构建了硬件电路系统,并通过相关试验测试了系统特性.试验结果证明:该扫描测头在垂直方向上可实现亚纳米级的分辨率.%A new probe of scanning-stylus fabricated by PVDF membrane and piezoelectric sensors was built, which can measure the topography of the soft, easily-destroyed samples as well as that with high step micro-features. Electric circuit system of the new probe was built,and the characteristics of the probe system were tested through a series of experiments. The experiment results show a sub - nano spacial resolution in vertical direction can be achieved with this probe.