基于平面线圈的磨粒监测传感器

摘要

In order to improve the oil on-line monitoring, a sensor for the measurement of wearing debris was presented, which was based on inductance measurement. The planar structure sensor was made by MEMS and the operation principle was intro-duced. The signal processing circuit was designed and the performance of sensor was studied. Experimental results show that the sensor has a sensitivity of 7. 145 5 V/g and can distinguish the ferro particles of 5 mg,it provides a new component for oil on-line monitoring.%为了提高油液的在线监测水平,研制了一种基于电感测量的铁磁性颗粒传感器,用MEMS工艺制作了一种平面线圈型的传感器并分析了其工作原理.设计了信号处理电路,对传感器的性能进行了实验研究.结果表明:颗粒含量在10～ 100 mg时,传感器具有良好的线性度,灵敏度为7.145 5 V/g,该传感器可以分辨5 mg的铁屑含量,输出稳定,为油液的在线监测提供了一种新的检测元件.