应变式三维加速度传感器的设计研究

摘要

Based on the measuring principle of inertia acceleration sensor,a new structure of strain three-dimension (3D) acceleration sensor was proposed which was composed by mass and elastic components in a series-parallel connection.Through the establishment of the sensor dynamics model,the optimum parameters were selected by orthogonal experiment method.The influence of structural parameters on the sensitivity and natural frequency and the 3D dynamic response of the sensor was analyzed based on the dynamics equation,and the 3D dynamic response of the sensor was analyzed by finite element method (FEM).The simulation results show the new strain 3D acceleration sensor has good low frequency characteristics which can extract the low frequency vibration signal of bearing effectively.And it benefits a lot between the low cost and easy to manufacture and assemble,which can be used in bearing condition monitoring and fault diagnosis field.%基于惯性式加速度传感器原理,采用质量块与弹性元件串并联的结构,提出了一种应变式三维加速度传感器.建立了应变式三维加速度传感器的动力学模型,运用正交试验法,优选了参数选择方案.分析了传感器结构参数对传感器固有频率和灵敏度及其综合性能指标的影响,获得了传感器三维动态响应曲线,并利用有限元方法对传感器的动态响应性能进行了仿真分析.仿真结果表明:新型应变式三维加速度传感器具有良好的低频特性,能有效提取轴承低频振动信号,且结构简单、成本低廉,易于加工装配,可用于轴承运行状态的监测与故障诊断领域.