一种静电驱动微机械谐振传感器的接口电路及应用

摘要

In order to measurement dynamic capacitor of interface for micro mechanical resonant sensor with electrostatic driv-ing,this paper presented a read interface circuit,which used a high frequency square wave to modulate the vibration signal and de-modulated the output signal with an analog switch. Taking the micro mechanical vibration double frame gyroscope with vacuum package and electrostatic driven as an example,experimental waveform agreed well with the expected design from interface circuit. By using the interface circuit and frequency scanning method we successfully measured that the driving mode resonant frequency was 13.552 kHzand the quality factor was 1863.%针对静电驱动微机械谐振传感器接口动态电容的测量,文中介绍了一种读取接口电路,采用了高频方波对振动信号进行调制,模拟开关进行解调。以静电驱动的某真空封装微机械振动双框架陀螺为例,接口电路实验测试得到的波形与设计预期一致,并利用接口电路和频率扫描方法成功测得微机械振动陀螺驱动模态谐振频率为13．552 kHz,品质因数为1863。