Ranlan测量Ge/Si多层膜中Ge晶粒尺寸的理论研究

摘要

We have studied Raman scattering from Gex/Si1-x multilayers prepared by MSE. After analyzing the distribution of Ge nonocrystals, by using the strong phonon confmement model and assuming the nonocrystals have spherical shape with shell structure, having considered the nonocrystal surface effects the Raman spectra of the Ge nonocrystals have been fitted with Gaussian function. The theoretical curve is the superposition of three bands which come from amorphous surface and crystal core parts respectively. The fitting result is in good agreement with the experiments.%研究了用磁控溅射方法制备的Gex／Si1-x多层膜的Ge拉曼光谱，在分析了多层膜中Ge微晶的分布和采用微晶壳层结构假设的条件下，考虑了微晶表面效应的影响，用声子限域模型计算了Ce纳米晶粒的拉曼谱线，拉曼拟合谱线为三条理论谱线的叠加。计算结果表明：在考虑了微晶的表面效应后，拟合结果与实验结果符合得很好。