蓝宝石红外窗口抗反射浮雕结构研究

摘要

Subwavelength periodic structure on infrared material can achieve antirefiective function at infrared band. In harsh environment, infrared window may replace infrared antireflective film. And it can provide corrosion resistance, shock resistance, etc. This paper describe the design of subwavelength relief unit structure using effective medium theory, and fabrication of the relief structure on the surface of sapphire material by photolithograph and ion etching. The infrared transmittance improved about 10 percent. The relation of antireflective and Periodic, filling cycle, and unit depth etc are analyzed.%采用相应技术,在红外材料表面制成的亚波长浮雕结构能实现红外波段的减反功能.在恶劣环境中,红外窗口采用该结构代替红外减反膜能够提高其抗蚀、抗冲击等性能.通过等效媒质理论设计亚波长浮雕单元结构,采用光刻及离子蚀刻方法完成蓝宝石材料表面浮雕结构制作,经测试红外透过率整体提高大约10%.经分析,浮雕结构的周期、占空比、单元深度等因素都对减反结果影响很大.