双光子光聚合与功能微纳结构制备

摘要

Accompanying the development of nanophotonics,nanoelectronics and biomedical tissue engineering,the miniature of the device,the structure variety and the highly integration make new challenges to micro/nanostructure and device manufacturing.In this paper,the two-photon polymerization technique,the principle of two-photon polymerization,the research progress of two-photon photoinitiator,and the application of fabricating functional micro/nanostructure and device by two-photon polymerization technique have been reviewed and discussed.%随着纳米光电子学及生物医学组织工程领域的发展,器件的小型化、结构多样化及高度集成化,给微纳结构与器件制造领域带来了新的挑战.本文围绕飞秒激光双光子聚合技术,简要综述了双光子光聚合基本原理与双光子引发剂分子的研究进展,并对飞秒激光双光子聚合技术在功能微纳结构与器件制备中的应用及发展前景进行了展望.