首页> 外国专利> Autofocusing method using fluorescence of pre-two-photon absorption region for two-photon photopolymerization nanofabrication system

Autofocusing method using fluorescence of pre-two-photon absorption region for two-photon photopolymerization nanofabrication system

机译:双光子光聚合纳米制造系统中利用双光子前吸收区荧光的自动聚焦方法

摘要

The present invention relates to an autofocusing method for a two-photon photopolymerization nanofabrication system, which comprises the following: a laser source outputting ultrashort pulse laser beam capable of causing Twophoton Absorption Phenomenon in an autofocusing system for a two-photon photopolymerization nanofabrication system using fluorescence of pre-two-photon absorption region; a Galvano shutter converting a laser beam route extended; a mirror converting the route by reflecting laser beam outputted by the laser source; an object lens for forming focus for reflected light reflected from the mirror; a substrate part including two-photon photopolymerization resin on the sub strate for forming a micro/nano-structure; a stage for transporting the substrate to X, Y and Z axis; a CCD camera extracting fluorescence force created in the resin on the substrate; and a control computer automatically controlling the location of the stage for moving the substrate to a searched location by searching the focus location automatically using fluorescence force extracted by the CCD camera.
机译:本发明涉及一种用于双光子光聚合纳米制造系统的自动聚焦方法,包括以下步骤:在使用荧光的双光子光聚合纳米制造系统的自动聚焦系统中,输出能够引起双光子吸收现象的超短脉冲激光束的激光源。前两个光子的吸收区域; Galvano百叶窗转换了扩展的激光束路径;镜子通过反射激光源输出的激光束来转换路线;物镜,用于为从反射镜反射的反射光形成焦点;基板部分包括在基板上的用于形成微/纳米结构的双光子光聚合树脂。用于将基板传送到X,Y和Z轴的平台; CCD照相机提取在基板上的树脂中产生的荧光力;控制计算机通过使用由CCD照相机提取的荧光力自动搜索焦点位置来自动控制用于将基板移动到搜索位置的平台的位置。

著录项

  • 公开/公告号KR101340386B1

    专利类型

  • 公开/公告日2013-12-11

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20120043290

  • 发明设计人 공홍진;정병제;

    申请日2012-04-25

  • 分类号B82B3;B29C67;

  • 国家 KR

  • 入库时间 2022-08-21 15:44:06

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