多关节机械手在晶圆减薄机中的应用

摘要

从机械手工艺应用、结构设计、电气控制、推广应用等几方面介绍了多关节机械手在晶圆减薄机中的应用。晶圆减薄机作为封装领域的重要设备,它的开发和应用,对我国封装产业的发展具有重大意义。多关节机械手是全自动晶圆减薄设备晶圆传输的核心部件,直接体现了设备的自动化程度。%The article introduces Multi-Articular Robot of Back grinding machine,it includes Technological process, Physical design, Electric control, Application and so on. Exploitation and application of Back grinding machine will be important to Package industry. Multi-Articular Robot is the important part of Back grinding machine, The application is directly to the automation of the equipment.