新型砷化镓多晶高压合成炉设计与制造

摘要

在分析原卧式砷化镓多晶合成炉缺陷的基础上．借鉴其它进口砷化镓单晶炉体部分结构优点，综合创新设计等制造出立式砷化镓多晶合成炉。经过300多炉次砷化镓多晶合成，证实新型砷化镓合成炉具有装、取料方便、电极不易沉积砷、炉体清洁快速等优点。由于提高了新合成炉密闭性及增强了石墨系统稳定性，从而保证了砷化镓多晶合成产品的一致性。%Based on the analysis defected of the GaAs polycystal synthesized horizontal fumace,make reference to other import GaAs crystal fumace body＇s structure advantage,We have been designed and manufactured GaAs polycrstal vertical Synthesized furnace. The furnace passed through 300 times running,have been approved this new type GaAs synthesizer with advantage of easily charge and discharge material and difficult to deposit arsenic on the electropolar and easy cleanning of the inside furnace .Improved synthsizer leakproofness and enhanced the graphite thermal system stability, So ensured quality consistency of the GaAs Polvcvstal materials.