sol-gel法制备氧化锌铝陶瓷靶材及其性能研究

摘要

为提高常压烧结法制备的掺铝氧化锌(AZO)靶材性能,以sol-gel法制备的Al-ZnO复合纳米粉末为原料,对制备工艺参数进行了优化.结果表明:湿法球磨对生坯的密度均匀性有利;随成型压力提高靶材致密度先升后降,电阻率呈相反趋势;增加烧结保温时间,晶粒尺寸变大,致密度与电阻率改善不明显;采用2 MPa成型压力,在1 250℃烧结1.0 h,所得到的掺杂质量分数为2%的Al的ZnO靶材致密度达99.2%,电阻率约为2×10-2Ω·cm.%To increase the properties of AZO targets fabricated by normal pressure sintering method, using the sol-gel method prepared Al-ZnO (AZO) nanocomposite powders as raw material, the preparing process parameters were optimized.The results indicate that the wet milling is benefit to the green density uniformity; with the increase of forming pressure, the density of target first increases and then decreases, but the resistivity has the reverse trend; increasing the sintering holding time, the grain size increases, however, the improvements of density and resistivity are not obvious. Using 2 MPa forming pressure, sintering at 1 250 ℃ for 1.0 h, the density of zinc oxide target doped with w(Al)=2％ is up to 99.2％, and the resistivity is about 2× 10-2 Ω · cm.