基于结构优化的微型磁通门降噪技术研究

摘要

Structural improvement of core is conducive to reduce the noise of the micro fluxgate sensor. In this paper, topology analysis and targeted optimization of core was completed. The micro fluxgate based porous core was fabricated by standard MEMS technology. By testing and comparing main noise index, the experimental results show that optimized structure of core can reduce noise of micro fluxgate sensor and enhance overall performance of micro fluxgate.%对铁芯结构的改进有利于降低微型磁通门传感器的噪声,本文对铁芯结构进行了拓扑分析与优化,并采用标准MEMS工艺制备了相应的多孔铁芯结构微型磁通门,对所制备的微型磁通门进行了主要噪声指标的综合测试与对比分析.实验结果表明,改进后的多孔铁芯结构能很好地降低微型磁通门传感器的噪声,提高器件的综合性能.