电火花线切割加工反向插补算法研究

摘要

Wire electrical-discharge machining (WEDM) of semiconductor material ,the voltage waveform of normal discharge condition and short-circuit is too similar to differentiate. According to relation between current probability (current pulse number divided by the voltage pulse number) within a certain period and feed speed,when current pulse probability reaches a certain threshold,the feed system is required to fallback. But general interpolation algorithm is typically a single direction interpolation algorithm and fallback in strict accordance with the original track back can not be achieved,therefore inverse interpolation algorithm must be proposed. The reversible interpolation algorithm was deduced on the basis of step-by-step trace method ,and the interpolation examples show correctness of the interpolation algorithm.%电火花线切割加工半导体材料时，正常放电状态和短路状态的电压波形相近而无法区分。根据一定周期内的电流脉冲个数除以电压脉冲个数（即电流脉冲概率）与进给速度的关系，当电流脉冲概率达到一定阈值时，要求进给系统能够回退。但一般插补算法都是单向的，无法做到严格按原轨迹回退，故要求有反向插补算法。由单步追踪法推导出反向插补算法，并通过插补实例证明其正确性。