直驱 XY 平台的改进鲁棒迭代学习控制

摘要

针对直驱XY平台鲁棒交叉耦合控制（ CCC）系统设计迭代学习控制（ ILC）器的过程中，没有充分利用鲁棒控制的有效信息增加设计复杂性的问题。依据具有不确定性的直驱系统的鲁棒性条件和ILC在L2范数下的鲁棒收敛条件，采用鲁棒反馈控制器设计过程中保证鲁棒性的性能加权函数设计单轴ILC控制器。建立了直驱XY平台的系统模型，并给出了单轴鲁棒ILC控制器和双轴变增益CCC控制器的设计方法。与传统ILC控制器设计相比，所提出的方法不但保证了系统的鲁棒性，而且简化了设计过程，提高了系统的跟踪精度和轮廓精度。仿真和实验结果验证了所提方法的正确性和有效性。%In the direct-driven XY table system of robust cross-coupled control ( CCC ) , the designing process of iterative learning control ( ILC) controller does not fully make use of the effective information of robust control,thus it increases the complexity.In order to solve this problem,the ILC controllers were designed in each axis with the performance weighting function that ensures the robustness, according to the robust condition of the direct-driven system with uncertainty and the robust convergence condition of the ILC in L2 norm sense.Model of the direct-driven XY table system was established,and the designing methods were proposed both for the robust ILC controller in each axis and for the vary-gain CCC controller between two axes.Compared with the traditional ILC,this method guarantees the robustness,simplifies the process and improves the tracking and contour performances.At last the simulation and experiment results show the effectiveness of the proposed method.