MEMS惯性传感器技术的误差补偿及可靠性研究

摘要

文章基于MEMS惯性传感器中加速度计与陀螺仪的基本工作原理，采用建立误差模型的方法，对MEMS惯性传感器的系统误差和随机误差进行误差补偿方法的相关研究；根据涵盖了绝大部分针对环境失效机理的可靠性试验项目MIL-STD-883进行MEMS惯性传感器的可靠性研究，同时总结相应的可靠性试验研究方法，并对未来的发展趋势提出几点浅见。%Add speed meter based on MEMS inertial sensors and the basic working principle of a gyroscope,adopt the method of error model is established,the system error and random error of MEMS inertial sensor error compensation method of related research;According to the environmental failure mechanism for the most part covers for reliability test project MIL-STD-883 for the reliability of the MEMS inertial sensor research,and summarizes the corresponding reliability test methods,and puts forward some humble opinions on the future trend of development.