State Key Laboratory of Functional Materials for Informatics;
Shanghai Institute of Microsystem and Information Technology;
Chinese Academy of Sciences;
Shanghai 200050;
China;
Center of Materials Science and Optoelectronics Engineering;
University of Chinese Academy of Sciences;
Beijing 100049;
China;
Science and Technology on Monolithic Integrated Circuits and Modules Laboratory;
Nanjing Electronic Device Institute;
Nanjing 210016;
China;
Microwave Devices and Integrated Circuits Department;
Institute of Microelectronics;
Chinese Academy of Sciences;
Beijing 100029;
China;
