基于MEMS微振镜的高精度正弦光栅产生方法

摘要

为提高相位测量轮廓术中正弦光栅的精度,提出一种基于MEMS微振镜的新型正弦光栅产生方法.采用对矩形光栅叠加的思想,在图像传感器一次曝光过程中,对多幅亮度相同、周期相同、占空比不同的矩形光栅进行光积分,最终输出正弦光栅图像.实验分析表明,相比基于光强调制方式的传统正弦光栅产生方法,该方法解决了非线性失真问题,能够产生更高精度的正弦光栅,具有成本低、体积小、能够通过编程灵活变换光栅图案等优点.%In order to improve the accuracy of sinusoidal grating in Phase Measuring Profilometry,this paper introduces a new generation method of sinusoidal grating,which is based on MEMS micro-mirror.Adopting the idea of superposition of rectangular grating,each pixel integrates multiple images of rectangular gratings with same brightness and period but different duty ratio in the exposure time of the sensor,then the sensor outputs the sinusoidal grating every frame. The experiment shows that the sinusoidal grating generated by this method has high accuracy and overcomes the nonlinear distortion,involved by traditional generation meth-od of sinusoidal grating based on modulate light intensity.Besides this method has advantages of low cost,small size,and flexible to transform by programming.