School of Mechanical Engineering Southeast University Nanjing 211189 China;
School of Mechanical Engineering Southeast University Nanjing 211189 China;
School of Mechanical Engineering Southeast University Nanjing 211189 China;
School of Mechanical Engineering Southeast University Nanjing 211189 China;
School of Mechanical Engineering Southeast University Nanjing 211189 China;
atomic layer deposition; MoS2 film; self-limiting surface reaction; growth mechanism;