[1]Key Laboratory of Microelectronics Device & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
[2]University of Chinese Academy of Sciences, Beijing 100049, China;
[1]Key Laboratory of Microelectronics Device & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
[2]University of Chinese Academy of Sciences, Beijing 100049, China;
[1]Key Laboratory of Microelectronics Device & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
[2]University of Chinese Academy of Sciences, Beijing 100049, China;
[1]Key Laboratory of Microelectronics Device & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
[1]Key Laboratory of Microelectronics Device & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
[2]University of Chinese Academy of Sciences, Beijing 100049, China;
[1]Key Laboratory of Microelectronics Device & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
[2]University of Chinese Academy of Sciences, Beijing 100049, China;
[1]Key Laboratory of Microelectronics Device & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
[2]University of Chinese Academy of Sciences, Beijing 100049, China;