The two resonators of the micromechanical silicon resonant accelerometer are coupled together within the region of the frequency crossover point. This paper analyzes the causes of this phenomenon and designs a new type of micromechanical silicon resonant accelerometer with different resonant frequency, and then simulation was carried out. The accelerometer consists of a common proof mass, micro-leverage mechanism amplifying the inertial force, and a pair of resonators with different size. The device is fabricated by DDSOG technology. Simulation results show that, the natural frequency of the above resonator is 124 678 Hz,the other one is 125 855 Hz,and the frequency offset is 1 177 Hz. During measuring range,the structure can be very good to eliminate the influence of the coupling between two resonators,removing measuring blind area. The sensitivity of the designed accelerometer is 92 Hz/gn,with the measuring range of ±10 gn.%分析了硅微谐振式加速度计的两个谐振器在谐振频率相交点附近区域产生耦合的原因,设计了一种新型的不等基频硅微谐振式加速度计,并对其进行了有限元仿真.该加速度计由质量块、放大惯性力的杠杆机构以及一对尺寸不同的谐振器组成.采用DDSOG工艺加工.利用ANSYS有限元软件进行仿真,结果表明加速度计上谐振器的谐振基频为124 678 Hz,下谐振器的谐振基频为125 855 Hz,频率差为1 177 Hz,在全量程范围内谐振频率不相交,可以很好的消除两个谐振器之间耦合的影响,去除了测量盲区;该加速度计的标度因数为92 Hz/gn,量程为±10 gn.
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