新型双并联电渗微泵的制备与测试

摘要

This paper designed a double parallel electroosmotic driven pump which consisted of three parallel main channels and interdigital electrodes. Each channel is formed by a number of parallel grooves which have a 45° an⁃gle with the direction of forming electroosmotic fluid. By selecting ITO glass slide as substrate and getting its opti⁃mum parameters,the PDMS-glass microfluidic chip containing electrodes was made. Finally,the EOP was tested, by recording the volume of single main channel pumping liquid in a period of time,the flow rate of single main chan⁃nel and the total micro-pump were obtained. It was found in experiment that within 5 V,the ability of EOP pumping liquid increased with the increase of voltage,and the micro-pump flow rate could reach aqueous humor production rate of normal human eyes. In future,the structure will show potential in applications for aqueous drainage device.%设计了一个双并联电渗驱动泵，它由三条并联的主通道和叉指型电极两部分组成，其中每条主通道由若干个与电渗流形成方向成45°角的沟槽并联构成。通过选用ITO载玻片作为芯片基底并获得其最佳工艺参数，制作了带电极的PDMS-玻璃微流控芯片。最后对制作的电渗微泵进行测试，通过记录一段时间内单个主通道泵输送液体的体积，得出单个主通道的流速与微泵总流速。实验发现在5V内，微泵泵送液体的能力随着电压的增加而增大，微泵流速可以达到正常人体眼球房水生成速度，该结构在未来房水引流器件制作方面具有潜在的应用价值。