梳齿式电容加速度传感器等效并联电阻对器件输出产生的影响

摘要

梳齿式电容加速度传感器检测电容的测量结果会受到除感应电容之外的其他等效电路参数的影响。梳齿式电容加速度传感器的结构与多层瓷片电容（MLCC）的结构类似，因此可以借鉴多层瓷片电容中等效电路参数的研究方法对电容加速度传感器中的等效电路参数进行研究。本文将对梳齿式电容加速度传感器检测结构中的等效电路参数进行建模，并分析这些等效电路参数对测试结果产生的影响。%Measurement of the sensing capacitance among the structure of the comb accelerometer could be affected by the equivalent electrical parameters besides the sensing capacitance. Equivalent electrical parameters of Multi⁃layer Ceramic Capacitance(MLCC)have been studied,since the structure of the comb accelerometer is similar to Multilayer Ceramic Capacitance(MLCC),the equivalent electrical parameters of the comb accelerometer could be analyzed in the same way. This paper will introduce the model of the sensing capacitance with equivalent electrical parameters and analyzes the effect of these parameters on the measurement result.