Method, and the capacitive accelerating sensor which produce the capacitive accelerating sensor

摘要

This invention, more accurately, regards the capacitive accelerating sensor in regard to the measurement equipment which is used for measuring acceleration. As for purpose of this invention, offering the production method the capacitive accelerating sensor being improved, at the same time, being to offer the capacitive accelerating sensor, the said sensor is applicable in use with solution of the minute capacitive accelerating sensor, especially, the said sensor measures the acceleration for several axes, minuteness quite it is applicable in use with solution of the thin capacitive accelerating sensor. Selective figure Figure 5