基于PTFE基材的FAIMS传感器设计

摘要

为降低FAIMS传感器制作的复杂度与成本,设计了一种基于PTFE基板的FAIMS传感器.该传感器由漂移管、离子源及外围电路组成.其中漂移管基于PTFE基板构建,使用PCB工艺制备Au电极,利用厚度为0.4 mm氧化铝条作为绝缘支撑片将上下电极隔离并形成通道,用于离子分离与检测,漂移管的总体积1.9 cm3.离子源通过针-网式电晕放电建立,通过软焊接工艺连接到FAIMS上基板.外围电路包括FAIMS工作所需的高频高压非对称电场及补偿电场产生电路和微弱离子电流放大电路.常温下,传感器响应恢复时间小于3 s.利用化学战剂模拟剂甲基膦酸二甲酯DMMP(Dimethyl Methylphosphonate)测试了传感器的灵敏度,实现了0.5 μg/m3的量级DMMP样品的检测.%In order to reduce the complexity and cost of FAIMS sensor,an FAIMS sensor based on PTFE is de-signed. The sensor consists of drift tube,ionization source and peripheral circuit. The drift tube is built on the PTFE substrate,where the Au electrodes were produced byPCB process;and the total volume of the drift tube is 1.9 cm3. A corona discharge ionization source is on the top of the FAIMS substrate. The peripheral circuit includes the high frequency and high-voltage asymmetric waveform,the compensating electric waveform generating circuit and the weak ion current amplifying circuit. It is less than 3 seconds of the response recovery time. A chemical agent simu-lant(Dimethyl methylphosphonate,DMMP)was tested,and the detection of DMMP is the 0.5 μg/m3.