Design of a Biochemistry Sensor based on FAIMS Theory and Optimization Design Considering Brim-effect of Electrical Field

摘要

A biochemistry sensor based on FAIMS (field asymmetric mobility spectrometry) theory has been fabricated and characterized. The rectangular drift tube of FAIMS is 20×10×2mm3 and is equipped with a plane-to-plane dielectric barrier discharge as the ionization source. The rectangular drift tube and ionization source were fabricated by MEMS technology with deposited metal films on glass substrates. At ambient pressure, the sensor was characterized by acetone and ethanol mixtures with nitrogen (99.99%) as carrier gas. The ability to separate ions was demonstrated by experiment. By the ANSYS software, the effects of parameters of drift tube, such as length, thickness, distance between rectangular drift tubes et al on brim-effect of electrical field were analyzed, which brings the theoretical foundation for the optimization design of the biochemistry sensor.