用于激光诱导等离子体光谱分析的便携式中阶梯光栅光谱仪设计

摘要

Laser-induced breakdown spectroscopy (LIBS) has attracted increasing interest and is widely used for routine elemental analysis.In order to enable LIBS to detect complete spectral information within a quite short time,a small size echelle spectrograph with spectral coverage from 180 ～400 nm was designed.According to the analysis of the optical system,the parameters are calculated and the aberrations are corrected well.In this way,this echelle spectrograph can obtain two-dimension spectral graph with high resolution quickly.By testing and calibrating the Hg lamp,the actual resolution gets up to 0.036 8 nm at 253.652 nm which can satisfy the analysis requirement of LIBS.%激光诱导等离子体光谱分析技术是一种非接触式实时检测技术,它已成为一种新兴的物质成分与浓度分析手段,并在工业生产等领域有着重要应用.为了使激光诱导等离子体光谱分析技术在极短的时间内同时获得全面的光谱信息,本文设计了一款波段范围为180 ～400 nm的轻小型中阶梯光栅光谱仪.通过分析其光学性能,确定了系统的结构参数,并对像差进行了分析校正.对汞灯特征光谱进行了测试标定,仪器光谱分辨率在253.652 nm处可达0.036 8 nm,满足激光诱导光谱分析技术对仪器光学性能的需求.