后处理工艺对钛基纳米金刚石涂层场发射特性的影响

摘要

采用胶带粘贴、金相砂纸摩擦、射频氢等离子体工艺对钛基纳米金刚石涂层进行了处理,分析了它们对样品的微观表征、场发射性能、发光效果的影响.首先通过电泳法将金刚石粉末移植到金属钛片上,然后经过真空热处理、表面后处理工艺形成了场发射阴极涂层,最后对样品进行了微观表征、场发射特性与发光测试.结果表明,胶带处理在场强达到10 V/μm时,场发射电流密度从50 μA/cm2增j加到72 μA/cm2;金相砂纸处理在10 V/μm场强下的场发射电流由48 μA/cm2提高到82 μA/cm2;适当的氢等离子体处理有助于降低表面功函数,使得金刚石表面的悬键被氢原子饱和,在其表面形成C-H键,进一步降低了电子亲和势,从而提高了样品的场发射性能和发光均匀性.%The Ti-based nano-diamond coatings were treated by tape-stripping, metallographic sandpaper friction, and RF hydrogen plasma process.The effects of the post processing technology on the samples were analyzed by testing the morphology, field emission property, and luminescence effect of the samples.The diamond powders were transferred to metal titanium sheet by electrophoresis method, and then the field emission cathode coating was formed after vacuum heat treatment and surface post-treatment technology.finally, the microscopic mophology, field emission properties and luminescence effect of the samples were characterized.For tape-stripping processing, the field emission current density increases from 50 μA/cm2 to 72 μA/cm2 at the electric field of 10 V/μm.For metallographic sandpaper friction, the current density increases from 48 μA/cm2 to 82 μA/cm2 at the electric field of 10 V/μm.Moreover, appropriate hydrogen treatment is helpful to reduce the work function of the surface.The dangling bonds of the diamond surface are saturated by hydrogen atom and C-H bonds form on the surface, which can reduce the electron affinity to improve the field emission properties and luminous uniformity of the samples.